laser-induced pattern projection etching


laser-induced pattern projection etching
Микроэлектроника: лазерно-стимулированное проекционное травление

Универсальный англо-русский словарь. . 2011.

Смотреть что такое "laser-induced pattern projection etching" в других словарях:

  • Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of …   Wikipedia

  • Extreme ultraviolet lithography — (also known as EUV or EUVL ) is a next generation lithography technology using the 13.5 nm EUV wavelength. EUVL opticsEUVL is a significant departure from the deep ultraviolet lithography used today. All matter absorbs EUV radiation. Hence, EUV… …   Wikipedia


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